A Battery-Less Wireless Respiratory Sensor Using Micro-Machined Thin-Film Piezoelectric Resonators
نویسندگان
چکیده
منابع مشابه
Shear Mode Piezoelectric Thin Film Resonators
1.1 Shear mode bulk acoustic wave devices and sensors Acoustic microsensor technique, well known as QCM (Quartz crystal microbalance) or TSM (Thickness shear mode) sensor, is an effective method to detect small mass loading on the sensor surface. This sensor can be operated even in liquid by using shear mode resonance. Therefore, shear mode piezoelectric film resonators are attractive for liqui...
متن کاملA Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor
The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin f...
متن کاملPiezoelectric thin-film superlattices without using piezoelectric materials
In this paper we show that experimentally realizable apparently piezoelectric thin-film superlattices can be created from nonpiezoelectric materials provided an odd-order e.g., trilayer stacking sequence is used. The size-dependent mechanism of flexoelectricity, which couples gradients of strain to polarization, allows such a possibility. We present closed-form analytical expressions for the re...
متن کاملCharacterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Fabrice F.C. Duval a,∗, Stephen A. Wilson a, Graham Ensell b, Nicolas M.P. Evanno c, Markys G. Cain d, Roger W. Whatmore a,1 a School of Industrial and Manufacturing Science, Cranfield University, Bedfordshire MK43 0AL, UK b INNOS Limited, Mountbatten Building, Highfield, Southampton, Hampshire SO17 1BJ, UK c Rolls-Royce Plc, Strategic Research Centre, Sina-28, P.O. Box 31, Derby DE24 8BJ, UK d...
متن کاملMEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out
We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2021
ISSN: 2072-666X
DOI: 10.3390/mi12040363